PI无尘室中的制造

功能和性能

在多个生产基地,PI都具有在无尘室条件下进行产品制造和质量鉴定的能力。这种能力还在根据市场需求不断拓展和提高。

根据不同位置的工艺流程,PI或其合作伙伴能按照规定清洁每个位置的零件和产品,然后检查清洁结果,确认是否存在颗粒污染并在必要时确认有无其他类型的污染。

经校准的颗粒测量装置使PI能按照ISO 14644-1的规范监控无尘室的质量。

PI还可测量操作条件下其自身产品产生的颗粒的数量。

标准

自2001年起,无尘室的分类不再执行US FED STD 209E,取而代之的是ISO 14644-1。以下表格中列出的有些无尘室的分类同时基于两种标准。

 

基于ISO14644-1的无尘室分类

每m³的颗粒数

Class0.1 µm0.2 µm0.3 µm0.5 µm1.0 µm5.0 µm
ISO 5100,00023,70010,2003,520832 
ISO 61,000,000237,000102,00035,2008,320293
ISO 7   352,00083,2002,930
ISO 8   3,520,000832,000 

 

基于US FED STD 209E的无尘室分类

每m3的颗粒数

Class0.2 µm0.3 µm0.5 µm5.0 µm
10026,48610,5943,531 
1,000  35,315247
10,000  353,1472,472
100,000  3,531,47024,720

 


可用无尘室/超洁净作业场所

除了无尘室,PI还拥有安装在无尘室内部或外部的超洁净作业场所。与各自的环境相比,它们的目的在于进一步减少特定工艺流程步骤中的颗粒污染。

以下概览按照位置列出了现有和筹建设施。

PI Karlsruhe

PI Karlsruhe is the largest production and development site in the PI Group. Standard and custom products, mainly in the field of piezo-based positioning systems, hexapods, and magnetic drives are assembled and qualified here. All areas for mass production, including incoming goods inspection, are ISO class 8 cleanrooms.

In addition, PI Karlsruhe has a newly created ISO class 5 cleanroom that also considers all standards applied to EUV applications. The Special Products Fractal, in addition, has rooms classified according to ISO class 7 as well as ISO class 5 ultraclean workplaces. An ISO class 7 laboratory is available in the Development department.

Cleanroom classificationAvailable space in m2
ISO 5250
ISO 6 - 
ISO 7600
ISO 83,000

Cleanrooms at PI KA



PI Ceramic, Lederhose

The entire process chain for multilayer production, beginning with tape casting, is realized at PI Ceramic in cleanrooms according to ISO class 6, 7, and 8; the assembly processes for piezo actuators and sensors of the Building Components product division also take place consistently in ISO class 7 or 8 cleanrooms. Depending on the process requirements, ISO class 7 to 9 cleanrooms are available for further selected processes such as sputtering, screen printing, and dispensing.

Cleanroom classificationAvailable space in m2
ISO 6310
ISO 7720
ISO 8620
ISO 9340

Cleanrooms at PI Ceramic, incl. building extension (completion in Q3/2020)

PI miCos, Eschbach

All assembly areas at PI miCos, including incoming goods inspection, are ISO class 8 cleanrooms. Some of these cleanrooms contain ultraclean workplaces with ISO class 5. The Engineered Systems division also has an ISO class 7 cleanroom.

Cleanroom classificationAvailable space in m2
ISO 510
ISO 6 - 
ISO 760
ISO 8650

Cleanrooms at PI miCos

PI USA, Hopkinton

PI USA has an ISO class 8 assembly island in the production area, which includes measuring capabilities, cleaning, and packaging under cleanroom conditions.


 

White paper
Manufacturing in Cleanrooms at PI (Physik Instrumente)
Capabilities and Capacity

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