E-509 信号调节器/压电伺服模块

带/不带伺服控制器的三通道传感器模块,用于E-500系统

PI E-509
用于带应变片传感器和电容式传感器的压电陶瓷定位系统的位置控制
单通道、双通道和三通道版本
改善线性误差
去除漂移和滞后
陷波滤波器可实现更高带宽
增加压电刚性
ILS电路优化电容式传感器的线性度
用于E-500压电控制器机架的模块
计算机接口和显示模块

Position control module with sensor evaluation electronics

The E-509 is a position control module with sensor evaluation electronics for nanopositioning systems with integrated position sensors. It automatically eliminates drift or hysteresis occurring during voltage-controlled piezo operation, and compensates changes in the position of the piezo actuator position when the piezo voltage is adjusted immediately after a change of load.

Nanometer-precision piezo positioning

Proportional-integral position control of the E-509 servo controller module is optimized for piezo operation. The proportional and integral term as well as the control bandwidth can be adjusted individually. The integrated notch filters (can be set for each axis) improve the stability and allow wider -bandwidth operation closer to the mechanical resonant frequency of the piezo system. Depending on the piezo mechanics and the sensor type, positioning accuracy and repeatability is therefore possible in the nanometer range.

The E-509.E03 model for signal evaluation and E-509.E3 model as servo controller module are available for the high-resolution capacitive single-plate sensors in the PISeca series.

规格

pdf
pdf

数据表E-509

2018-02-13
2018-02-13
pdf - 111 KB
pdf - 112 KB

下载

数据表

pdf
pdf

数据表E-509

2018-02-13
2018-02-13
pdf - 111 KB
pdf - 112 KB

文件

pdf

用户使用手册PZ62

E-500/E-501系列模块化压电控制器:底盘带电源、放大器模块(E-503、E-504、E-505、E-506、E-508)、传感器和伺服控制模块(E-509)、显示和接口模块(E-515、E-517)。
2013-07-11
English
pdf - 2 MB
pdf

用户使用手册PZ77

E-509传感器/压电伺服控制模块
2009-02-20
English
pdf - 1 MB