N-111 NEXLINE®OEM线性促动器

长行程纳米定位,PiezoWalk®原理

N-111 NEXLINE®OEM线性促动器
产品描述 规格 下载 报价/订购
  • 行程为10毫米
  • 集成线性编码器,分辨率为5纳米
  • 产生的力高达50牛
  • 保持力达70牛

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

规格

数据表N-111

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 585 KB
pdf - 592 KB
pdf - 497 KB

下载

数据表

数据表N-111

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 585 KB
pdf - 592 KB
pdf - 497 KB

文件

用户使用手册MP110

N-111.20 / N-111.2A NEXLINE® OEM压电步进促动器
版本/日期
1.0.1 2017-06-20
版本/日期
1.0.1 2017-07-20
文件语言
pdf - 885 KB
pdf - 963 KB

用户使用手册MP142

N-111.201和N-111.2A1 NEXLINE® OEM压电步进促动器
版本/日期
1.0.1 2016-12-05
版本/日期
1.0.1 2016-12-05
文件语言
pdf - 1 MB
pdf - 1 MB

3D模型

N-111 STEP

版本/日期
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文件语言 English

报价/订购

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