N-216 NEXLINE®线性促动器

用于长行程纳米级定位的高力PiezoWalk®驱动器

N-216 NEXLINE®线性促动器
产品描述 规格 下载 报价/订购

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

规格

数据表N-216

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 713 KB
pdf - 722 KB
pdf - 2 MB

下载

数据表

数据表N-216

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 713 KB
pdf - 722 KB
pdf - 2 MB

文件

用户使用手册N216T0013

N-216.101、1A1、201、2A1 NEXLINE®压电步进高负载促动器
版本/日期
2017-07-20
文件语言 English
pdf - 1 MB

3D模型

N-216 STEP

文件语言 English

报价/订购

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