N-310 NEXACT®OEM小型线性电机/促动器

紧凑型高速PiezoWalk®驱动器

N-310 NEXACT®OEM小型线性电机/促动器
产品描述 规格 下载 报价/订购
  • 行程为10至125毫米,动轮长度可灵活选择
  • 紧凑型设计,高性价比设计
  • 分辨率达0.03纳米
  • 力量生成高达10牛

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

规格

数据表N-310

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 666 KB
pdf - 678 KB
pdf - 460 KB

下载

数据表

数据表N-310

版本/日期
2018-04-17
版本/日期
2018-04-17
版本/日期
2017-11-16
文件语言
pdf - 666 KB
pdf - 678 KB
pdf - 460 KB

文件

用户使用手册N310T0012

版本/日期
2017-04-28
文件语言 English
pdf - 325 KB

3D模型

N-310 STEP

文件语言 English
zip - 341 KB

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。

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