P-620.Z – P-622.Z PIHera精密Z向位移台

多种行程范围和轴配置

P-620.Z – P-622.Z PIHera精密Z向位移台
产品描述 规格 下载 报价/订购
  • 行程范围50微米至250微米(400微米开环)
  • 分辨率达0.1纳米
  • 定位精度0.02%
  • 带电容式传感器的直接计量
  • X、XY、Z和XYZ型

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-620.Z – P-622.Z

版本/日期
2018-04-16
版本/日期
2018-04-13
文件语言
pdf - 657 KB
pdf - 1 MB

下载

数据表

数据表P-620.Z – P-622.Z

版本/日期
2018-04-16
版本/日期
2018-04-13
文件语言
pdf - 657 KB
pdf - 1 MB

文件

用户使用手册PZ234

具有电容传感器的P-620、P-621、P-622、P-625、P-628、P-629 PIHera压电陶瓷平台
版本/日期
2014-07-15
版本/日期
2014-07-15
文件语言
pdf - 1,015 KB
pdf - 1 MB

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

3D模型

P-62x.Z STEP

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。

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