S-303 压电移相器

带直接计量选项的高速压电移相器

S-303 压电移相器
产品描述 规格 下载 报价/订购
  • 谐振频率为25千赫兹,可实现亚毫秒级的动态
  • 电容式传感器选项可实现最高的线性度和稳定性
  • 行程为3微米
  • 紧凑尺寸:直径为30毫米×10毫米
  • 带孔径的开环版本
  • 殷钢选项可实现最高的热稳定性

Fields of application

  • (Fizeau) interferometry
  • Optical nanomanipulation and inspection
  • Scanning microscopy

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA®piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

规格

数据表

数据表S-303

版本/日期
2019-08-29
版本/日期
2019-08-29
文件语言
pdf - 695 KB
pdf - 697 KB

下载

数据表

数据表

数据表S-303

版本/日期
2019-08-29
版本/日期
2019-08-29
文件语言
pdf - 695 KB
pdf - 697 KB

文件

文件

简短说明PZ277EK

S-3xx压电陶瓷偏摆台
版本/日期
1.0.0 November 2017
pdf - 1 MB

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