A 250-picometer step (0.25 nm) of the S-303 platform, controlled by an E-503 amplifier module and an E-509.C1A servo controller module. Measured with a special ultrahigh-resolution, capacitive measuring device, ±0.02 nm resolution.
S-303.CD / .CDi, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
S-303.0L / .0Li, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
S-303 压电移相器
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Application fields
(Fizeau) interferometry
Optical nanomanipulation and inspection
Scanning microscopy
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
