P-541.2 • P-542.2 XY压电工作台

大口径低外形XY纳米定位系统

P-541.2 • P-542.2 XY压电工作台
产品描述 规格 下载 报价/订购
  • 16.5毫米的极低外形、易于集成
  • 通光孔径80毫米 × 80毫米
  • 行程达200微米×200微米
  • 更佳的响应和多轴精度:并联运动/计量
  • 高动态直接驱动版本
  • 传感器的选择:应变片传感器(成本更低)或电容式传感器(性能更高)
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 与长行程显微镜平台组合实现更长行程

Fields of application

  • Scanning microscopy
  • High-throughput microscopy
  • Super-resolution microscopy
  • Mask/wafer positioning
  • Interferometry
  • Measuring technology
  • Biotechnology
  • Micromanipulation

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

规格

数据表P-541.2 • P-542.2

版本/日期
2018-04-16
版本/日期
2018-04-16
文件语言
pdf - 735 KB
pdf - 1 MB

下载

数据表

数据表P-541.2 • P-542.2

版本/日期
2018-04-16
版本/日期
2018-04-16
文件语言
pdf - 735 KB
pdf - 1 MB

文件

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

用户使用手册PZ244

P-541、P-542 XY大口径纳米级定位系统
版本/日期
2013-03-21
版本/日期
2013-03-21
文件语言
pdf - 687 KB
pdf - 683 KB

显微镜配件概述

PI显微镜样品架和显微镜平台的接装板
文件语言
pdf - 39 KB
pdf - 38 KB

3D模型

P-541.2 STEP

P-542.2 STEP

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。

可用配件

询问工程师

通过电子邮件或电话从当地PI销售工程师处快速获取解答。