P-562.6CD PIMars六轴压电平台系统

六自由度高精度纳米定位系统

P-562.6CD PIMars六轴压电平台系统
产品描述 规格 下载 报价/订购
  • 6个运动轴:3个为线性,3个为旋转
  • 行程达200微米(线性)和1毫弧度(摆角)
  • 更佳的响应和多轴精度:并联运动/计量
  • 带电容式传感器,具有最高线性度和稳定性
  • 无摩擦、高精度柔性铰链导向系统
  • 优异的扫描平面度
  • 通光孔径66毫米 × 66毫米
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 超高真空兼容至10-9 百帕

描述

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-562.6CD

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 647 KB
pdf - 654 KB

下载

数据表

数据表P-562.6CD

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 647 KB
pdf - 654 KB

3D模型

P-562.6CD STEP

zip - 809 KB

报价/订购

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