P-587 六轴精密压电平台

长扫描范围,直接位置测量

P-587 六轴精密压电平台
产品描述 规格 下载 报价/订购
  • 用于X、Y、Z和θ向上的定位和扫描X, ΘY, ΘZ
  • 线性范围为800微米×800微米×200微米
  • 最大旋转角度达1微弧度
  • 更佳的响应和多轴精度:并联运动/计量
  • 带电容式传感器的直接计量可实现最佳线性度
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 无摩擦、高精度柔性铰链导向系统
  • 六自由度上的主动轨迹控制

描述

Fields of application

  • Interferometry
  • Metrology
  • Nanoimprinting
  • Semiconductor tests
  • Semiconductor manufacturing

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-587

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 635 KB
pdf - 643 KB

下载

数据表

数据表P-587

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 635 KB
pdf - 643 KB

文件

用户使用手册PZ251

具有电容传感器的P-587.6CD六轴纳米级定位系统
版本/日期
2014-03-27
版本/日期
2014-03-27
文件语言
pdf - 720 KB
pdf - 740 KB

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。