D-510 PISeca电容式传感器

具有极佳位置分辨率的单板传感器

距离/运动/振动的非接触测量
绝对位置检测
亚纳米级分辨率
可选量程
简易集成

Highest accuracy and lifetime due to capacitive position sensors

In conjunction with the electronics for signal processing, a resolution can be reached in the subnanometer range for quasistatic applications. The bandwidth can be increased up to 10 kHz for high dynamics application, where a resolution in the 1 nm range can still be reached. The linearity error is under 0.1%.

Easy handling and integration

All PISeca sensor heads are equipped with a LEMO connector for easy mounting and replacement. The uniform shaft thickness ensures compatibility and flexibility. The cable for connecting to the evaluation electronics is available in several variants and must therefore be ordered separately.

Customized versions / two-electrode sensors

In addition to the standard sensors listed here, PI offers a series if application-specific custom versions where for example, the measuring range, geometry or material are adapted to customer requirements. Customized electronics are also available.

The two-electrode sensors in the D-100 series are available for the highest demands on linearity and resolution.

Fields of application

Industry and research. Semiconductor manufacturing and inspection. Nanometrology. Active vibration absorber. Precision machining.

规格

数据表D-510

版本/日期
2018-04-13
版本/日期
2018-04-13
文件语言
pdf - 232 KB
pdf - 235 KB

图纸/图片

[Translate to Chinese:] D-510.021 with LEMO connector for easy handling
[Translate to Chinese:] PI D-510.xx1: D-510.021, D-510.051 and D-510.101 capacitive sensor probes, dimensions in mm. Sensor connection LEMO FFC00.650.CLA.543, triaxial

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。

可按需提供定制设计和其他电缆长度。

下载

数据表

数据表D-510

版本/日期
2018-04-13
版本/日期
2018-04-13
文件语言
pdf - 232 KB
pdf - 235 KB

文件

技术说明D510T0001

D-510 PISeca单电极电容式传感器探头
版本/日期
2011-04-05
文件语言 English
pdf - 176 KB

3D模型

D-510 STEP

zip - 60 KB