P-363 PicoCube XY(Z)压电扫描仪

用于扫描探针显微镜的高动态纳米级扫描仪

P-363 PicoCube XY(Z)压电扫描仪
产品描述 规格 下载 报价/订购
  • 用于AFM / SPM的超高性能闭环扫描仪
  • 用于生物/纳米技术的紧凑型操纵工具
  • 谐振频率为9.8千赫兹
  • 电容式传感器可实现最高精度
  • 并联运动计量可实现导向误差的自动化补偿
  • 分辨率为50皮米
  • 行程为5微米 × 5微米 × 5微米
  • 真空兼容版本

Fields of application

  • Scanning probe microscopy
  • Atomic force microscopy
  • Scanning and screening

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-363

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 840 KB
pdf - 850 KB

下载

数据表

数据表P-363

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 840 KB
pdf - 850 KB

3D模型

P-363 STEP

报价/订购

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