P-363 PicoCube XY(Z)压电扫描仪

用于扫描探针显微镜的高动态纳米级扫描仪

PI P-363
用于AFM / SPM的超高性能闭环扫描仪
用于生物/纳米技术的紧凑型操纵工具
谐振频率为9.8千赫兹
电容式传感器可实现最高精度
并联运动计量可实现导向误差的自动化补偿
分辨率为50皮米
行程为5微米 × 5微米 × 5微米
真空兼容版本

规格

pdf
pdf

数据表P-363

2015-01-30
2015-01-30
pdf - 860 KB
pdf - 858 KB

图纸/图片

[Translate to Chinese:] PI P-363 Diagram, 300 picometer steps (0.3 nm) performed with the P-363, measured with an external high-resolution, capacitive measurement system
[Translate to Chinese:] PI P-363 Diagram, The P-363 settles to within 1 nm in 1 ms (100 nm step, X and Y motion; faster response in Z)
[Translate to Chinese:] P-363.2Cx, dimensions in mm. Removable top plate.
[Translate to Chinese:] P-363.3Cx, dimensions in mm. Removable top plate.

下载

数据表

pdf
pdf

数据表P-363

2015-01-30
2015-01-30
pdf - 860 KB
pdf - 858 KB

3D模型

zip

P-363 STEP

English
zip - 318 KB