P-517 • P-527 多轴压电陶瓷扫描仪

用于扫描探针显微镜的高动态纳米级扫描仪

P-517 • P-527 多轴压电陶瓷扫描仪
产品描述 规格 下载 报价/订购
  • 2轴和3轴版本(XY和XYθ型)Z)
  • 行程范围达200 µm
  • 亚纳米级分辨率

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

规格

数据表P-517 • P-527

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 605 KB
pdf - 612 KB

下载

数据表

数据表P-517 • P-527

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 605 KB
pdf - 612 KB

文件

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

用户使用手册PZ82

具有电容传感器的P-517、P-518、P-527、P-528、P-558压电纳米定位系统
版本/日期
2013-09-05
版本/日期
2013-09-05
文件语言
pdf - 939 KB
pdf - 938 KB

3D模型

P-5x7 STEP

zip - 221 KB

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