P-561 • P-562 • P-563 PIMars纳米级定位平台

多达六轴的高精度纳米级定位系统

P-561 • P-562 • P-563 PIMars纳米级定位平台
产品描述 规格 下载 报价/订购
  • 并联运动/计量可实现更佳的响应和多轴精度
  • 行程范围达300x300x300微米
  • 带电容式传感器,具有最高线性度和稳定性
  • 无摩擦、高精度柔性铰链导向系统
  • 优异的扫描平面度
  • 高动态性XYZ版本可供货,达六自由度的定制版本
  • 通光孔径为66毫米 × 66毫米
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 超高真空兼容型可达10-9 百帕

Fields of application

  • Scanning microscopy
  • Mask/wafer positioning
  • Interferometry
  • Measuring technology
  • Biotechnology
  • Scanning and screening

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-561 • P-562 • P-563

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 762 KB
pdf - 764 KB

下载

数据表

数据表P-561 • P-562 • P-563

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 762 KB
pdf - 764 KB

文件

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

用户使用手册PZ248

P-561、P-562、P-563 PIMars XYZ纳米级定位系统
版本/日期
2013-11-22
版本/日期
2013-11-22
文件语言
pdf - 947 KB
pdf - 972 KB

3D模型

P-56x STEP

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