P-733.2 • P-733.3 XY(Z)压电纳米级定位平台

具有孔径的高精度XY(Z)扫描仪家族

P-733.2 • P-733.3 XY(Z)压电纳米级定位平台
产品描述 规格 下载 报价/订购
  • X和Y向上的行程达100微米 × 100微米,Z向上的行程达10微米
  • 带电容式传感器,分辨率达0.1纳米
  • 带直接驱动器的高速版本
  • 真空兼容型和无磁性版本
  • 并联运动实现更高动态和更佳多轴精度
  • 并行计量实现主动轨迹控制
  • 无摩擦、高精度柔性铰链导向系统
  • 50毫米×50毫米的通光孔径用于透射光应用

Fields of application

  • Scanning microscopy
  • Confocal microscopy
  • Mask/wafer positioning
  • Surface measuring technology
  • Nanoimprinting
  • Micromanipulation
  • Image processing / stabilization
  • Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Suitable for sophisticated vacuum applications

All components used in the piezo systems are are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

规格

数据表P-733.2

版本/日期
2018-04-16
版本/日期
2018-04-16
文件语言
pdf - 618 KB
pdf - 626 KB

下载

数据表

数据表P-733.2

版本/日期
2018-04-16
版本/日期
2018-04-16
文件语言
pdf - 618 KB
pdf - 626 KB

文件

用户使用手册PZ103

具有电容传感器的P-733、P-734压电陶瓷纳米级定位系统
版本/日期
2012-12-10
版本/日期
2012-12-10
文件语言
pdf - 858 KB
pdf - 863 KB

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

显微镜配件概述

PI显微镜样品架和显微镜平台的接装板
版本/日期
2018-05-16
版本/日期
2018-05-16
文件语言
pdf - 138 KB
pdf - 150 KB

3D模型

P-733 STEP

zip - 2 MB

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

With direct drive

Versions with Sub-D connector (m)

Versions with LEMO connector

Accessories

Linear positioners, vacuum compatible to 10-9 hPa