P-518 • P-528 • P-558 压电陶瓷Z向/偏摆平台

高动态,带大通光孔径

P-518 • P-528 • P-558 压电陶瓷Z向/偏摆平台
产品描述 规格 下载 报价/订购
  • 三轴Z向和偏摆平台 / 单轴Z向位移台
  • 闭环垂直/倾斜范围达200微米/2毫弧度(开环达240 微米/2.4 毫弧度)
  • 并联运动实现更快的响应时间和更高的多轴精度
  • 零间隙,高精度柔性铰链导向系统
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 通光孔径为66 毫米 × 66 毫米
  • 电容式传感器带来最高线性度

Fields of application

  • Metrology
  • Interferometry
  • Photonics / integrated optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Sample alignment
  • Micromachining

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High tracking accuracy in the nanometer range due to parallel position measuring

All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on the bandwidth) (active guiding). High tracking accuracy is achieved in the nanometer range even in dynamic operation.

规格

数据表P-518 • P-528 • P-558

版本/日期
2018-05-08
版本/日期
2018-05-08
版本/日期
2017-10-04
文件语言
pdf - 669 KB
pdf - 677 KB
pdf - 870 KB

下载

数据表

数据表P-518 • P-528 • P-558

版本/日期
2018-05-08
版本/日期
2018-05-08
版本/日期
2017-10-04
文件语言
pdf - 669 KB
pdf - 677 KB
pdf - 870 KB

文件

用户使用手册PZ82

具有电容传感器的P-517、P-518、P-527、P-528、P-558压电纳米定位系统
版本/日期
2013-09-05
版本/日期
2013-09-05
文件语言
pdf - 939 KB
pdf - 938 KB

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

3D模型

P-5x8 STEP

zip - 338 KB

报价/订购

所需数量、价格和供货周期请求免费报价或描述您所需的改型。所有线上有货的产品均可直接订购。

询问定制设计!