P-541.Z 压电Z和Z/偏/摆平台

低外形,大孔径

P-541.Z 压电Z和Z/偏/摆平台
产品描述 规格 下载 报价/订购
  • 16.5毫米的极低外形、易于集成
  • 通光孔径80 mm × 80 mm
  • 垂直和Z/偏/摆平台
  • 行程100µm
  • 偏角为1毫弧度
  • 更佳的响应和多轴精度:并联运动/计量
  • 传感器的选择:应变片传感器(成本更低)或电容式传感器(性能更高)
  • PICMA压电陶瓷促动器带来超长使用寿命
  • 与长行程显微镜平台组合实现更长行程

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

规格

数据表P-541.Z

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 600 KB
pdf - 607 KB

下载

数据表

数据表P-541.Z

版本/日期
2018-05-08
版本/日期
2018-05-08
文件语言
pdf - 600 KB
pdf - 607 KB

文件

简短说明PZ240EKDK

P-5xx、P-6xx、P-7xx压电陶瓷定位系统
版本/日期
4.0.0 2017-02-06
pdf - 635 KB

3D模型

P-541.Z STEP

zip - 704 KB

报价/订购

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