N-216.1A1
NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 300 N feed force; incremental linear encoder; 2 m cable length
N-216 NEXLINE® Linear Actuator
Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle
- Force generation to 600 N
- Holding force to 800 N
- Travel range 20 mm
- Integrated direct-measuring linear encoder with resolution 5 nm
Comparison of the motion type of a NEXLINE® actuator: The nanostepping mode provides very smooth motion. Full step mode allows higher speed.
N-216, dimensions in mm
N-216 NEXLINE® Linear Actuator
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Application fields
- Industrial precision positioning
- Semiconductor technology
- Semiconductor tests
- Wafer inspection
- Lithography
- Nanoimprinting
- Nanometrology
- Motion in strong magnetic fields and in a vacuum
Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Suitable for sophisticated vacuum applications
Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.
Specifications
Specifications
| Motion | N-216.1A1 | N-216.2A1 | Tolerance |
|---|---|---|---|
| Active axes | X | X | |
| Travel range in X | 20 mm | 20 mm | |
| Travel range in X (analog mode) | ± 3 µm | ± 3 µm | |
| Velocity (10% duty cycle, full-step mode) | 1 mm/s | 1 mm/s | max. |
| Velocity (100% duty cycle, full-step mode) | 0.6 mm/s | 0.6 mm/s | max. |
| Velocity (100% duty cycle, nanostepping mode) | 0.4 mm/s | 0.4 mm/s | max. |
| Positioning | N-216.1A1 | N-216.2A1 | Tolerance |
| Reference switch | Optical, direction sensing (reference edge track), 5 V, TTL | Optical, direction sensing (reference edge track), 5 V, TTL | |
| Resolution in X, open loop | 0.03 nm | 0.03 nm | typ. |
| Integrated sensor | Incremental linear encoder | Incremental linear encoder | |
| System resolution in X | 5 nm | 5 nm | |
| Drive Properties | N-216.1A1 | N-216.2A1 | Tolerance |
| Drive type | NEXLINE® piezo walking drive | NEXLINE® piezo walking drive | |
| Operating voltage | -250 to +250 V | -250 to +250 V | |
| Drive force in X | 300 N | 600 N | max. |
| Mechanical Properties | N-216.1A1 | N-216.2A1 | Tolerance |
| Holding force in X, passive | 400 N | 800 N | min. |
| Overall mass | 1150 g | 1250 g | |
| Material | Aluminum, stainless steel | Aluminum, stainless steel | |
| Miscellaneous | N-216.1A1 | N-216.2A1 | Tolerance |
| Operating temperature range | 0 to 55 °C | 0 to 55 °C | |
| Connector | D-sub 25-pin (m) | D-sub 25-pin (m) | |
| Cable length | 2 m | 2 m | +50 / -0 mm |
| Recommended controllers / drivers | E-712.1AM | E-712.1AM |
Velocity in full-step mode: Depending on drive electronics.
Velocity in nanostepping mode: Depending on drive electronics. The maximum velocity in nanostepping mode is designed for the best possible constancy so that no velocity variations occur when performing the steps.
Drive force: Data refer to full step mode operation.
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N-216.2A1
NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 600 N feed force; incremental linear encoder; 2 m cable length
