N-310 NEXACT® OEM Miniature Linear Motor / Actuator

Compact, Fast, with Long Travel Range, PiezoWalk^® Principle

Travel range 20 mm
Compact in size, inexpensive design
Resolution to 0.03 nm
Drive force up to 10 N

报价/订购

N-310.11, dimensions in mm

Nanometer precision and high feed force with PiezoWalk^® walking drives

In the PiezoWalk^® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology

下载数据表转到规格报价/订购

数据表

版本/日期

2025-01-23

pdf - 492 KB

版本/日期

2025-01-23

pdf - 510 KB

版本/日期

2017-11-16

pdf - 748 KB

下载

Select a travel range:

Motion	N-310.11	Tolerance
Active axes	X
Travel range in X	20 mm
Travel range in X (analog mode)	10 µm	max.
Maximum velocity in X, unloaded	10 mm/s
Positioning	N-310.11	Tolerance
Step size in full step mode	10 µm
Resolution in X, open loop	0.03 nm	typ.
Drive Properties	N-310.11	Tolerance
Drive type	NEXACT® piezo walking drive
Operating voltage	-10 to +45 V
Drive force in X	10 N	typ.
Mechanical Properties	N-310.11	Tolerance
Holding force in X, passive	12 N	max.
Overall mass	50 g	±5 %
Material	Stainless steel, ceramic; cable: PFA, PTFE
Miscellaneous	N-310.11	Tolerance
Operating temperature range	0 to 50 °C
Connector	HD D-sub 15 (m)
Cable length	1.5 m	±50 mm
Recommended controllers / drivers	E-712, E-861, E-861.11C885

Maximum velocity in X, unloaded: depending on the drive electronics

Resolution in X, open loop: depending on the drive electronics

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

下载数据表转到下载报价/订购

产品注解

版本/日期

2023-01-23

pdf - 86 KB

下载

数据表

版本/日期

2025-01-23

pdf - 492 KB

版本/日期

2025-01-23

pdf - 510 KB

版本/日期

2017-11-16

pdf - 748 KB

下载

文件

版本/日期

2024-12-20

pdf - 986 KB

English

3D模型

版本/日期

2025-01-02

zip - 119 KB

报价/订购

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

N-310.11

NEXACT^® OEM miniature linear motor / actuator; NEXACT^® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length

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N-310 NEXACT® OEM Miniature Linear Motor / Actuator

Compact, Fast, with Long Travel Range, PiezoWalk^® Principle

Specifications

数据表N-310

Specifications

Downloads

产品注解

ProductChangeNotificationN-310.XX-N-47X.XX

数据表

数据表N-310

文件

用户使用手册N310T0012

3D模型

N-310.11 3D Model

NEXACT^® OEM miniature linear motor / actuator; NEXACT^® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length

如何获取报价

询问工程师

技术

PiezoWalk®步进驱动器

真空

增量式传感器

多轴定位器

Contact

Quick Links

Wechat

Specifications

数据表N-310

Specifications

Downloads

产品注解

ProductChangeNotificationN-310.XX-N-47X.XX

数据表

数据表N-310

文件

用户使用手册N310T0012

3D模型

N-310.11 3D Model

NEXACT® OEM miniature linear motor / actuator; NEXACT® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length

如何获取报价

询问工程师

技术

PiezoWalk®步进驱动器

真空

增量式传感器

多轴定位器

NEXACT^® OEM miniature linear motor / actuator; NEXACT^® piezo walking drive; 20 mm travel range; 10 N drive force; 10 mm/s maximum velocity; 1.5 m cable length