N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

  • Force generation to 600 N
  • Holding force to 800 N
  • Travel range 20 mm
  • Integrated direct-measuring linear encoder with resolution 5 nm
N-216 NEXLINE® Linear Actuator
产品描述 规格 下载 报价/订购

Application fields

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

数据表

数据表N-216

版本/日期
2024-01-09
pdf - 786 KB
版本/日期
2024-01-09
pdf - 808 KB
版本/日期
2019-01-22
pdf - 788 KB

Downloads

数据表

数据表

数据表N-216

版本/日期
2024-01-09
pdf - 786 KB
版本/日期
2024-01-09
pdf - 808 KB
版本/日期
2019-01-22
pdf - 788 KB

文件

文件

用户使用手册MP120

N-216 NEXLINE线性促动器

版本/日期
1.2.1 2024-05-06
pdf - 2 MB
版本/日期
1.2.1 2024-05-06
pdf - 2 MB

3D模型

3D模型

N-216 3-D模型

zip - 225 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

询问工程师

通过电子邮件或电话从当地PI销售工程师处快速获取解答。

Compatible Electronics Related Products